Proposal for masks and collimators using beam processing and metal 3D printers.
Proposal for masks with ultra-fine slits, coded masks with high aspect ratios, and collimators.
◆Proposal for Masks Using our fine pore processing technology with a minimum hole diameter of φ0.1μm, we propose precision fine masks through continuous irradiation without cutting the beam, allowing for straight and curved slit processing. The thickness between slits can be made adjacent up to about 2μm, and by utilizing our available equipment, the slit width can be freely selected. However, there is a relationship of work thickness/slit width ≦ 5. ◆Proposal for Coded Masks By leveraging metal 3D printing technology, we propose collimators and coded masks that, while not in the ultra-fine area of beam processing, do not have the constraint of work thickness/slit width ≦ 5, allowing for free design of complex shapes.
- Company：東レ・プレシジョン
- Price：Other
